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J.P. Sauer & Sohn Maschinenbau GmbH
Brauner Berg 15
24159 Kiel / Germany

+49 431 3940-0 more


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You can find out more about gaseous silanes and silane compressors in this article.

Properties of silane gases

Monosilane is explosive in combination with air (1–98% SiH4). Other silanes can also form explosive mixtures with air. The lighter liquid silanes are highly flammable; this hazard increases with the length of the silicon chain.

Application of silane gases

Microelectronics and photovoltaic cells

Recommended compressor types

HAUG Neptune
HAUG Sirius

More

Case study silane compressor

Production of silane gas using an aerodynamic separation process (mass separation using centrifugal forces). Highly enriched silicon-28 can increase the conductivity of photovoltaic cells for the generation of solar energy.
Silane is an extremely flammable gas, which is why an oil-free and gas-tight compressor is required.
The entire production plant with the HAUG silane compressors is installed in a chamber filled with N2 to prevent silane from escaping into the environment.
HAUG supplied a specially designed compressor block in which each cylinder operates separately. This means that each cylinder has its own gas inlet and gas outlet.

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