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Compressor solutions for specialty gases
Maximum purity, reliability and safety – customised solutions for industry, research and development.
The oil-free, dry-running and hermetically gas-tight compressors of our HAUG brand have been specially developed for the compression of specialty gases. With many years of experience and expertise, we offer tailor-made compressor solutions for leading research institutes, universities, manufacturers, chemical companies, gas associations and gas companies.
Find the long list of specialty gases and their applications here.
Contact us today for a customised compressor solution that perfectly fits your gas project needs:
Specialty gases and applications:
We have experience in the compression of numerous specialty gases and gas mixtures. Here is an excerpt of the gas compressors we have successfully operated, the specialty gases and their application:
A | B | C | D | E | F | H | K | M | N | O | P | R | S | T | V | X
| Gas compressor type | Gas / Chemical formula | Application | More information |
|---|---|---|---|
| Ammonia compressor | Ammonia / NH3 | Fertilizer production, refrigerant, industrial cleaning, chemical production | |
| Argon compressor | Argon / Ar | Shielding gas in metallurgy and welding, filler gas in light bulbs | Click here |
| Butadiene compressor | Butadiene / C4H6 | Production of synthetic rubber, plastics | |
| 1-Butene compressor | 1-Butene / C4H8 | Production of polyethylene, intermediate in the chemical industry | |
| i-Butane compressor | i-Butane / C4H10 | Refrigerant, component of liquefied petroleum gas (LPG) | |
| n-Butane compressor | n-Butane / C4H10 | Refrigerant, component of liquefied petroleum gas (LPG) | |
| C4-FN (Novec 4710) / C5-FK (Novec 5110) compressor | C4-FN (Novec 4710) / C5-FK (Novec 5110) | Insulating gases, arc extinguishing | Click here |
| Chlorine compressor | Chlorine / Cl2 | Water disinfection, production of plastics and chemicals | |
| Chlorotrifluoroethylene compressor | Chlorotrifluoroethylene (CTFE) / C₂F₃C | Fluoropolymer production, particularly for Teflon (PTFE) and other specialty plastics | Click here |
| Chlorodifluoromethane compressor | Chlorodifluoromethane / ChClF2 | Refrigerant (R-22), precursor for fluoropolymers | |
| Chloromethane compressor | Chloromethane / CH3Cl | Chemical intermediate, production of silicones | |
| Chlorotrifluoroethene compressor | Chlorotrifluoroethene / C2ClF3 | Production of fluoropolymers, chemical intermediate | |
| Chlorotrifluoromethane compressor | Chlorotrifluoromethane / CClF3 | Refrigerant, solvent | |
| Coke oven gas compressor | Mixture (H₂, CH₄,CO) | Fuel in steelworks, chemical raw material | |
| Deuterium compressor | Deuterium / D2 | Nuclear fusion research, isotope studies | |
| Dichlorodifluoromethane compressor | Dichlorodifluoromethane / CCl2F3 | Former refrigerant (R-12), now largely banned | |
| Dichloroethane compressor | Dichloroethane / C2H4Cl2 | Production of vinyl chloride, solvent | |
| Dichlorofluoromethane compressor | Dichlorofluoromethane / CCl2HF | Refrigerant (R-21), chemical intermediate | |
| Dichloromethane compressor | Dichloromethane / CH2Cl2 | Solvent, extraction agent in chemistry | |
| Dichlorotetrafluoroethane compressor | Dichlorotetrafluoroethane / C2Cl2F4 | Refrigerant (R-114), now largely replaced | |
| Difluoroethane compressor | Difluoroethane / C2H4F2 | Refrigerant, propellant in aerosols | |
| Difluoromethane compressor | Difluoromethane / CH2F2 | Refrigerant (R-32), component of R-410A | |
| Dimethyl ether compressor | Dimethyl ether / C₂H6O | Propellant, CFC substitute, fuel | |
| Ethane compressor | Ethane / C₂H₆ | Raw material in petrochemistry (ethene production) | |
| Ethylene compressor | Ethylene / C₂H₄ | Production of plastics (polyethylene), plant hormone for ripening | |
| Fluorine compressor | Fluorine / F₂ | Glass etching, production of fluorine compounds | |
| Heptafluoropropane compressor | Heptafluoropropane / C₃HF₇ | Fire suppressant, refrigerant | |
| Hexafluoropropene compressor | Hexafluoropropene / C₃F₆ | Production of fluoropolymers | |
| Hexafluoroethane compressor | Hexafluoroethane / C₂F₆ | Refrigerant (R-116), used in the semiconductor industry | |
| Hexane compressor | Hexane / C₆H₁₄ | Solvent, extraction of plant oils | |
| Hydrogen sulfide compressor | Hydrogen sulfide / H₂S | Production of sulfur compounds, used in refineries | |
| Krypton compressor | Krypton / Kr | Lighting (krypton lamps), insulation in windows | |
| Methanethiol compressor | Methanethiol / CH₃SH | Odorant for natural gas, chemical intermediate | |
| Molybdenum fluoride compressor | Molybdenum fluoride / MoF₆ | Semiconductor industry, production of molybdenum compounds | |
| Neon compressor | Neon / Ne | Lighting (neon tubes), filler gas in tubes | |
| Nitric oxide compressor | Nitric oxide / NO | Medical inhalation therapy, atmospheric chemistry research | |
| Nitrous oxide compressor | Nitrous oxide / N₂O | Anesthetic, propellant in the food industry | |
| n-Pentane compressor | n-Pentane / C₅H₁₂ | Propellant, solvent, foam blowing agent | |
| Octafluoropropane compressor | Octafluoropropane / C₃F₈ | Refrigerant (R-218), fire suppressant | |
| Ozone compressor | Ozone / O₃ | Water disinfection, air purification, chemical syntheses | Click here |
| Pentafluoroethane compressor | Pentafluoroethane / C₂HF₅ | Refrigerant (R-125), component of refrigerant mixtures | |
| Pentafluoropropane compressor | R-245 fa / C₃HF₅ | Refrigerant, propellant in aerosols | |
| Perfluorobutane compressor | Perfluorobutane / C₄F₁₀ | Fire suppressant, refrigerant | Click here |
| Perfluoropropane compressor | Perfluoropropane / C₃F₈ | Refrigerant (R218), fire suppression systems, plasma etching in semiconductor manufacturing | Click here |
| Propane compressor | Propane / C₃H₈ | Fuel, refrigerant | |
| Propene compressor | Propene / C₃H₆ | Production of polypropylene, chemical intermediate | |
| Propylene oxide compressor | Propylene oxide / C₃H₆O | Production of polyurethanes and glycol ethers | |
| R-404A compressor | Mixture | Refrigerant mixture (R-125, R-143a, R-134a) | Click here |
| R-407C compressor | Mixture | Refrigerant mixture (R-32, R-125, R-134a) | |
| R-410A compressor | Mixture | Refrigerant mixture (R-32, R-125), used in air conditioning systems | |
| R-473A compressor | Mixture | Refrigerant mixture used in ultra-low temperature applications (medical freezers, cryogenics) | Click here |
| Silicon tetrafluoride compressor | Silicon tetrafluoride / SiF₄ | Glass etching, semiconductor manufacturing | Click here |
| Sulfur dioxide compressor | Sulfur dioxide / SO₂ | Preservative, bleaching agent, used in chemical industry | |
| Sulfur hexafluoride compressor | Sulfur hexafluoride / SF₆ | Insulating gas in high-voltage circuit breakers, protective gas | Click here |
| Tetrafluoroethane compressor | Tetrafluoroethane / C₂H₂F₄ | Refrigerant (R-134a), fire suppressant | |
| Tetrafluoroethylene compressor | Tetrafluoroethylene / C₂F₄ | Production of fluoropolymers (e.g., Teflon) | |
| Tetrahydrothiophene compressor | Tetrahydrothiophene / C₄H₈S | Odorant for natural gas, chemical intermediate | |
| Trichlorotrifluoroethane compressor | R113 / C₂Cl₃F₃ | Former refrigerant, solvent | |
| Trichlorofluoromethane compressor | Trichlorofluoromethane / CCl₃F | Former refrigerant (R-11), solvent | |
| Trifluoroethane compressor | Trifluoroethane / C₂H₃F₃ | Refrigerant (R-143a) | |
| Toluene compressor | Toluene / C₆H₅CH₃ | Solvent in chemical processes, used in the production of paints, coatings, and as an intermediate in benzene production | Click here |
| Trifluoromethane compressor | Trifluoromethane / CF₃H | Refrigerant (R-23), used in semiconductor manufacturing | |
| Tungsten hexafluoride compressor | Tungsten hexafluoride / WF₆ | Semiconductor manufacturing, tungsten deposition | |
| Vinyl chloride compressor | Vinyl chloride / C₂H₃Cl | Production of polyvinyl chloride (PVC) | |
| Xenon compressor | Xenon / Xe | Lighting, anesthesia, space technology research | Click here |
Specialty gases for the semiconductor industry
The semiconductor industry places particularly high demands on the purity and reliability of the gases used. Our HAUG compressors are ideal for these demanding applications, where even the slightest impurities can have a serious impact on product quality.
Gases used in the semiconductor industry include, but are not limited to:
- Hexafluorethane (C₂F₆): Used in plasma etching and reactor cleaning in semiconductor production.
- Octafluoropropane (C₃F₈): Used in etching processes and as a reactor cleaning medium.
- Sulfur hexafluoride (SF₆): Used as an etching gas in the structuring of silicon and other materials.
- Nitrogen trifluoride (NF₃): For cleaning reactor chambers in semiconductor production.
- Silicon tetrafluoride (SiF₄): For the production and modification of silicon dioxide layers (SiO₂).
- Tungsten hexafluoride (WF₆): Used to produce tungsten films, which are needed for the metallisation of semiconductor components.